Overview
AMAT 0010-59787 is a ceramic heater designed by Applied Materials (AMAT) for semiconductor wafer processing.
Key Features and Specifications
- Part Number: 0010-59787
- Manufacturer: Applied Materials (AMAT)
- Type: Ceramic Heater
- Compatibility: Suitable for 300mm semiconductor wafer processing equipment
- Function: Provides precise heating in the processing chamber for CVD processes
- Material: High-purity ceramic, ensuring excellent thermal conductivity and high-temperature resistance
Advantages:
- Precise Temperature Control: Achieves highly accurate and repeatable heating.
- Uniform Heating: Ensures consistent temperature distribution.
- Long Lifespan: Withstands the demanding conditions of semiconductor manufacturing.
- Wide Compatibility: Works with various semiconductor processing equipment and processes.
Applications
AMAT 0010-59787 ceramic heaters are crucial for semiconductor manufacturing processes requiring precise temperature control, including:
- Chemical Vapor Deposition (CVD): Deposits thin films of materials onto semiconductor wafers.
- Epitaxy: Grows high-quality crystalline layers on semiconductor substrates.
- Annealing: Enhances the electrical and mechanical properties of semiconductor materials.
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